发明名称 INTERFEROMETRIC APPARATUS AND METHOD THAT COMPENSATE REFRACTIVE INDEX FLUCTUATIONS
摘要 <p>Methods and apparatus that combine dispersion interferometry with refractometry to compensate for refractive index fluctuations in the measurement path (20, 22) of a dispersion interferometer (44) over both short and long time periods. Dispersion and refractometry data (16) are weighted over appropriate time intervals, and means and methods are also provided for initializing GAMMA , the inverse dispersive power, so that the dispersion and refractometry data (16) are self consistent. A refractometer (26) is placed in close proximity to the measurement path (20, 22) of the dispersion interferometer (44) to experience substantially the same air flow and act as a surrogate for obtaining information about the index of refraction.</p>
申请公布号 WO0065302(A1) 申请公布日期 2000.11.02
申请号 WO2000US05859 申请日期 2000.03.07
申请人 ZYGO CORPORATION 发明人 DE GROOT, PETER, J.
分类号 G01B9/02;G01B11/00;G03F1/08;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G01B9/02;G01N21/41;G01B11/02;G01N21/43 主分类号 G01B9/02
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