SINGLE-CRYSTAL PULLING APPARATUS

摘要

A single-crystal pulling apparatus (1) according to the Czochralski technique comprises a main chamber (2), a pull chamber (3), a control deck (4) at a desired height adjacent to the main chamber (2) and the pull chamber (3), and a hand switch located on the control deck (4) to manipulate a remote controller (27) for controlling the vertical and rotational movements and withdraw of a single crystal. The single-crystal pulling apparatus (1) improves the safety of the workers on a catwalk around the apparatus and also improves the reliability of operation in consideration of the increasing weight and size of such apparatus.