发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE OF THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device which has improved electrical connection performance between its connection pad and bump, and its manufacturing method. SOLUTION: First, a mutual connection part is formed on a semiconductor device substrate. For instance, a conductive barrier layer covers the mutual connection part, a protective layer covers the conductive barrier layer and an aperture, through which a part of the conductive barrier layer is exposed, is formed in the protective layer. Or the protective layer 22 covers the mutual connection part, the aperture 24 through which the mutual connection part is exposed is formed in the protective layer 22, and the conductive barrier layer 32 covers the mutual connection part in the aperture 24.
申请公布号 JP2000306914(A) 申请公布日期 2000.11.02
申请号 JP20000086214 申请日期 2000.03.27
申请人 MOTOROLA INC 发明人 ALEXANDER L BAARU;SHURESHU BENKATESAN;DAVID B CREG;REBECCA G COLE;ORUBUNMI ADETSUUTSU;STUART E GREER;BRIAN G ANTHONY;RAMUNASSHU BENKATORAMAN;GREGOR BURAEKKURUMAN;DOUGLAS M RAEBER;STEPHEN R CROWN
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L21/768;H01L23/485;H01L23/532 主分类号 H01L23/52
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