STAGE DEVICE AND EXPOSURE DEVICE

摘要

A stage device which is composed of a rough movement stage and a fine movement stage which can be transferred relatively to the rough movement stage and driven relatively to the rough movement stage with a slight heat generation and a large thrust. The fine movement stage (3) is provided on the inner side of a recessed part (4a) in the rough movement stage (4) which is scanned in a scanning direction (Y-direction) at an approximately constant velocity at the time of scanning exposure so as to be movable two-dimensionally, and a reticle (R) which is an exposure object is held by attraction on the fine movement stage (3). The fine movement stage (3) is driven relatively to the rough movement stage (4) in a non-scanning direction (X-direction) by X-axis fine movement motors (8A and 8B) at two positions which use Lorentz forces, and in the scanning direction by a Y-axis fine movement motor (21) composed of a mover (22) which is an I-shaped core and a pair of magnets including stators (23A and 23B) which are E-shaped cores.