| 摘要 |
PROBLEM TO BE SOLVED: To dispense with the parameter value setting work by an operator and also parameter value estimation by the operator. SOLUTION: An exposure device system is provided with a plurality of aligners 2011 and 2012 and their server 202, in such a way that the software of the aligner 2011 and 2012 can be upgraded and has parameters, the initial values of which are to be set upon upgrading the software. The server 202 is provided with a means, which finds the initial value of the parameter to be set for the aligner device having software to be upgraded, based on the value of the same kinds of parameters in other aligners and a transfer means which transfers the found initial value to the aligners having the software to be upgraded. |
