| 摘要 |
PROBLEM TO BE SOLVED: To correct a measurement error caused by warpage or tilting of an axis due to insufficient rigidity of the axis and bearing for precision shape measurement, by providing an autocollimator optical system for detecting tilting of a flat mirror provided to a probe. SOLUTION: A high precision ruby ball 2 is provided to the tip of a probe 1 and a length-measuring reference mirror 6 (flat mirror) is fitted to the other end supported by a leaf spring 5. The displacement in axial direction of the probe 1 is measured with a displacement sensor 11, and the tilting of the mirror 6 is measured at high precision with an autocollimator optical system 21. When the probe 1 is tilted at measurement of a steep slope due to insufficient rigidity of a bearing 3, the tilt direction and tilt angle are measured at high precision with the autocollimator optical system 21. Related to the autocollimator optical system 2, the beam from a laser light source 21a is reflected on the mirror 6, and the spot position of the reflected beam is detected with a 2-dimension PSD (position sensor) 21d, for measuring the tilting of the mirror 6.
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