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发明名称
Verfahren und Vorrichtung zur Kathodenzerstäubung
摘要
申请公布号
DE69426003(D1)
申请公布日期
2000.11.02
申请号
DE19946026003
申请日期
1994.07.26
申请人
ASAHI GLASS CO. LTD., TOKIO/TOKYO
发明人
SHIMIZU, JUNICHI;WATANABE, SHUJIRO;TAKAKI, SATORU;OSAKI, HISASHI;OYAMA, TAKUJI;ANDO, EIICHI
分类号
C03C17/00;C03C17/22;C03C17/245;C03C17/34;C23C14/06;C23C14/08;C23C14/34;C23C14/35;G02F1/1343;H01B1/08;(IPC1-7):C23C14/00;H01J37/32
主分类号
C03C17/00
代理机构
代理人
主权项
地址
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