| 摘要 |
PURPOSE: A thin film actuated mirror array is provided to be capable of improving a horizontal degree of a mirror by forming the mirror on the second sacrifice having a flat surface. CONSTITUTION: An active matrix includes the first metal layer having a drain pad, which is extended from a drain of a MOS transistor. A support layer(185) consists of the first and second anchors for supporting an actuator and is extended horizontally toward the other side. A bottom electrode(190) is formed on the support layer(185), and an active layer(195) is formed on the bottom electrode(190). A top electrode(200) is formed on the active layer(195), and a via hole(210) is vertically formed to a top of one of the anchors from the drain pad of the first metal layer. An actuator includes a connection member(250) for connecting the drain pad and the bottom electrode through the via hole(210). The first auxiliar support member(270a) is formed at one side of the first anchor and a lower center of the support layer(185). The second auxiliar support member(270b) is formed at one side of the second anchor and a lower center of the support layer(185). A mirror(230) is formed on the actuator(250).
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