| 摘要 |
Disclosed is a method of controlling a processing apparatus designed to perform a predetermined process for a target processing substrate within a processing chamber after a predetermined operation of a movable member arranged in the processing chamber. The processing apparatus instructs the driving system of the movable member to perform an operation reverse to the predetermined operation when the predetermined operation cannot be confirmed within a defined time, and instructs the driving system to perform the predetermined operation again after the reverse operation is confirmed.
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