| 摘要 |
PROBLEM TO BE SOLVED: To produce an aluminum nitride(AlN) sintered compact having improved mechanical strength without deteriorating heat-radiating characteristic by controlling the growth of grains of AlN sintered compact and making the texture of the sintered compact fine to improve the strength and to make the strength uniform and to provide a method for producing the same. SOLUTION: The AlN sintered compact contains 1 to 10 wt.% of an oxide of at least one element selected from Ca, Sr and Ba which are elements of the group III a of the Periodic Table, 0.01 to 0.2 wt.% Si-component and at least one metal element selected from Ti, Zr, Hf, Nb, Ta, Mo and W in an amount of 0.1 to 0.5 wt.% expressed in terms of its oxide and has a thermal conductivity of >=150 W/m.K, three-point bending strength of >=50 kg/mm2 and an average crystalline grain size of 1 to 4 μm. Further, the aluminum nitride sintered compact contains the Si-component as at least one silicon compound selected from SiO2, Si3N4, SiC and Si2N2O. |
