发明名称 Ultrasonic cleaning apparatus
摘要 An ultrasonic cleaning apparatus has an intermediate tank having a space divided into a liquid storing region (2a) and a liquid recovering region (2b) by a partition plate (5). An ultrasonic unit (3) is disposed in the bottom of the liquid storing region (2a). A vibration propagating liquid, such as pure water, is contained in the liquid storing region (2a) and a lower part of a cleaning tank (1) is immersed in the vibration propagating liquid stored in the liquid storing region (2a). The partition plate (5) is provided in its upper edge (5c) with a plurality of V-shaped notches (9). A nozzle pipe (4) provided with a plurality of nozzle holes (4a) is disposed in a side of the liquid storing region (2a) opposite a side in which the partition plate (5) is disposed. Pure water jetted by the nozzle pipe (4) toward the outer surface (1a) of the bottom wall of the cleaning tank (1) flows along the outer surface (1a) and overflows the partition plate (5) into the liquid recovering region (2b).
申请公布号 US6138698(A) 申请公布日期 2000.10.31
申请号 US19980196010 申请日期 1998.11.19
申请人 TOKYO ELECTRON LIMITED 发明人 TANAKA, HIROSHI;KITAHARA, SHIGENORI;HIROSHIRO, KOKICHI
分类号 B08B3/12;H01L21/00;(IPC1-7):B08B3/12 主分类号 B08B3/12
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