发明名称 Sputter ion pump
摘要 <p>Sputter ion pump comprises an envelope housing, two spaced cathodes made of getter material and an anode having a number of hollow cylindrical cells parallel to each other disposed between the cathodes. Magnetic field is generated through the anode parallel to the axis of the cells. The cells are provided with a cross section having substantially the same area and an arcuated perimeter.</p>
申请公布号 EP1047106(A2) 申请公布日期 2000.10.25
申请号 EP19990123496 申请日期 1999.11.25
申请人 VARIAN S.P.A. 发明人 SPAGNOL, MIRIAM
分类号 H01J41/12;(IPC1-7):H01J41/12;H01J41/20 主分类号 H01J41/12
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