Wafer container box

摘要

The body (1) of a container has wafer alignment grooves (2) for holding wafers in parallel alignment. The body has a front cover (12), a gasket (11) and at least one retainer for the wafers. A bottom plate (14) has three oval guide members (15). An upper mount (17) has guide rails (18) and a threaded boss (19) for fastening a robotic flange (21). The container has lower side mountings (25) for a pair of guide rails (29) and side mountings (34) for a pair of manual handles (38).