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发明名称
A semiconductor device and method of fabrication thereof
摘要
申请公布号
EP0902487(A3)
申请公布日期
2000.10.25
申请号
EP19980300278
申请日期
1998.01.15
申请人
VYDYANATH, HONNAVALLI R.
发明人
VYDYANATH, HONNAVALLI R.
分类号
H01L21/205;H01L33/32;H01S5/00;H01S5/30;H01S5/323;(IPC1-7):H01L33/00;H01S3/19
主分类号
H01L21/205
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