| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electronic component having an electrode base film, which is excellent in the adhesive strength to a piezoelectric ceramic board and the like and is high in the accuracy of the film thickness, and the manufacturing method of the electronic component. SOLUTION: A vibration electrode film 2a is formed on the surface of a piezoelectric ceramic board 1 via an electrode base film 21. The films 21 and 2a are formed by a sputtering method. The film 21 is installed so that it consists of a nickel - titanium alloy containing 7.5 to 8.0 wt.% of titanium and the film thickness of the film 21 is installed so that it is formed within the range of 0.1 to 0.3 μm. |
