| 摘要 |
PROBLEM TO BE SOLVED: To prevent electrostatic charge on a substrate and enhance a yield of a product using the substrate, by a method wherein there are constituted a chuck coming into contact with an insulation face of the substrate and fixing the substrate, and two types of member in which electric charges become mutually an inverse polarity in electrostatic charges when releasing from the substrate. SOLUTION: When a glass plate 2 overrides a plate chuck 1, the glass plate 2 is vacuum attracted with a space of a groove. The glass plate 2 is electrostatically charged in minus when releasing from the glass plate. When the glass plate 2 overrides the plate chuck 1, a level of horizontality of the glass plate 2 is not affected by the heights of a cylindrical rubber 6. The glass plate 2 is conveyed to the plate chuck 1 via a hand 4 from the other conveyors, thereby vacuum attracting it. Here, the glass plate 2 is positioned with a mask to be transferred, thereby making an exposure processing. As soon as it is confirmed that a sucker 5 attracts, a vacuum attraction port 2 of the plate chuck 1 is set as an atmospheric state, and the glass plate 2 is lifted up by the hand 4, and is released from the plate chuck 1. Plus and minus static electricity mixedly existing on the glass plate 2 is neutralized. |
