| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive and practical diaphragm vacuum gauge in which the measuring range of the degree of vacuum is widened and the work for measuring the degree of vacuum can be enhanced. SOLUTION: The diaphragm vacuum gauge comprises a first reference pressure chamber 11 kept at a first degree of vacuum, and a second reference pressure chamber 21 kept at a second degree of vacuum higher than the first degree of vacuum. The first reference pressure chamber 11 is sealed hermetically by connecting a first diaphragm 12 with a second diaphragm 22 for sealing the second reference pressure chamber 21 hermetically. Degree of vacuum in a vacuum pressure measuring chamber 2 is measured from capacitance appearing between the first diaphragm 12 and a fixed electrode 3 disposed in the first reference pressure chamber 11.
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