| 摘要 |
PROBLEM TO BE SOLVED: To detect even a fine foreign matter on a test object substrate surely, in a short time and efficiently, without wrong detection. SOLUTION: A laser beam L is irradiated, scanning simultaneously, to the surface of a test object substrate 1, and scattered light R from the surface of the test object substrate 1 at that time is allowed to enter a photodetector 14, and existence of a foreign matter on the surface of the test object substrate 1 is inspected based on a detection result of scattered light R by the photodetector 14. When the foreign matter exists or there is a possibility of existing, a visual field of an optical microscope 15 is introduced into the position based on existing position information of the foreign matter, and the position is observed by enlargement by the optical microscope 15, and an observed image is taken in as image information by a camera 16, and existence of the foreign matter is finally confirmed based on the taken-in image information.
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