| 摘要 |
PROBLEM TO BE SOLVED: To remove height error data caused by multiple reflection effectively and carry out more accurate bump height detection by moving a position of a first regular reflection region according to a value based on a value of corresponding height data and a given angle. SOLUTION: As for a first regular reflection region 50b which is a reflection region from a bump and multiple reflection regions 51b, 52b, corresponding height datastored in a height data region is read for each unit picture element 500b constituting them. Then, each unit picture element 500b is moved according to a value corresponding to h/tan (θ) in a first reflection image from an original position in a reverse direction of first irradiation light by a position of the unit picture element 500b, read out height data (h) and an angle θ, and is made a unit picture element 501b. |
