发明名称 LIGHT SOURCE DEVICE
摘要 PROBLEM TO BE SOLVED: To further increase the effective pulse rate of a light source device. SOLUTION: A light source device is provided with a plurality of light sources 1a-1h which emit radiant light beams, one or more reflecting surfaces 2a, and a rotary reflecting body 2 which emits the radiant light beams emitted from the light sources 1a-1h along the common optical path L of the light sources 1a-1h. The light source device is also provided with a position detector 5 which detects the position of the reflecting surfaces 2a of the reflecting body 2, a timing control circuit 6 which outputs synchronizing signals for driving the light sources 1a-1h synchronously to the position of the reflecting body 2, and a power source circuit 7 which successively drives the light sources 1a-1h with pulses based on the output signal of the control circuit 6.
申请公布号 JP2000294491(A) 申请公布日期 2000.10.20
申请号 JP19990099805 申请日期 1999.04.07
申请人 LASERTEC CORP 发明人 KUSUSE HARUHIKO
分类号 H01L21/027;G02B26/08;G02B27/14;G03F7/20;H01S3/00;H01S3/225;(IPC1-7):H01L21/027 主分类号 H01L21/027
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