Reactor for plasma-chemical induced reactions has a discharge chamber or producing a plasma and an injection chamber for introducing reactive atoms and molecules and/or surface-modified aerosols and particles

摘要

Reactor has a discharge chamber or producing a plasma and an injection chamber for introducing reactive atoms and molecules and/or surface-modified aerosols and particles. The two chambers are directly arranged next to each other. An Independent claim is also included for a process for plasma-chemical induced reactions comprising using at least two different gas, vapor or particle streams or mixtures, producing reactive atoms and molecules and/or surface-modified aerosols and particles in one of these partial streams through a plasma, feeding into another partial stream in an injection chamber, and allowing the streams to mix. Preferred Features: The discharge chamber consists of a configuration for a dielectrically hindered discharge.