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发明名称
Positive photoresist with better properties
摘要
申请公布号
EP0601974(B1)
申请公布日期
1997.05.28
申请号
EP19930810824
申请日期
1993.11.25
申请人
OCG MICROELECTRONIC MATERIALS INC.
发明人
SCHAEDELI, ULRICH, DR.;MUENZEL, NORBERT, DR.
分类号
C08F12/22;C08F12/00;C08F22/36;C08F22/40;C08F222/40;C08K5/20;C08L25/00;C08L25/18;C08L33/04;C08L33/24;C08L35/00;G03F7/004;G03F7/039;(IPC1-7):C08F222/40;C08F212/14
主分类号
C08F12/22
代理机构
代理人
主权项
地址
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