MgO VAPOR-DEPOSITED MATERIAL AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To stably form a uniform film even by an electron beam vapor deposition method without causing trouble in a system for feeding an MgO sintered compact or generating splashes and to enhance the film characteristics of a formed MgO film. SOLUTION: The MgO sintered compact used has >=95% relative density and contains 0.5-50 vol.% alkaline earth metal oxide particles dispersed in the MgO matrix having grains whose average grain diameter is 0.3-100 μm. One or more elements selected from the group comprising Ca, Sr and Ba are preferably used as the alkaline earth metal element in the alkaline earth metal oxide particles.