| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent wasteful use of resources by improving efficiency of use, to prevent coming-out of wastes, and to reduce costs. SOLUTION: A container for housing and transporting thin plates comprises a container main body which houses and supports silicon wafers or the like. A cover receiving part 21 is provided at the container main body. A holding means for holding various kinds of covers is provided at the cover receiving part 21. The holding means is constructed, comprising fitting holes 22 for first holding claws to be fitted to the first holding claws provided at a first type cover body, magnets 25 to be attracted to magnets provided at a second type cover body, and a sealing groove 26 which contacts for sealing with a sealing material provided at a third type cover body and maintains the vacuumized inside under the negative pressure. Thereby, each of cover bodies for exclusive use is attached at each of such processes as transportation, manufacturing and storage, and a single container body 2 is made usable at a plurality of processes.</p> |
