| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the operation of setting a target temperature pattern by constituting of a device for controlling the temperature of a hot plate by controlling the flow rate of a medium flowing to the plate, a device for controlling the temperature of the plate to coincide with a target temperature pattern, and further a sequencer for outputting a switching signal of a valve. SOLUTION: A sequencer 13 outputs a heating signal 17. Then, a controller 12 starts outputting a target set pattern signal(SP), and opens a switching valve 3. A heating three-way valve 1 starts so that a temperature of a hot plate 11 becomes a set value of the SP. A medium circulated by a pump 8 and heated by a heater 6 is supplied from a port AB to a port A of the valve 1. Further, the medium is pumped to the plate 11 by a pump 9. Then, a cooling three-way vale 2 only communicates the port AB with a port B. The medium returned from the plate 11 is again sucked by the pump 8, and circulated. After a heating step is finished, the sequence 13 outputs a cooling signal 18. The controller 12 starts controlling the cooling step, and a selector valve 4 is opened.
|
