发明名称 Fabrication method of amorphous light rare earth-transition metal and metalloid alloy films
摘要 A method of making amorphous light rare-earth transition metal (LRE-TM)-metalloid alloys having perpendicular magneto anisotropy energy, is provided. In this method of making amorphous LRE-TM-metalloid alloys by depositing a metalloid on an LRE-TM by sputtering, the sign of a saturation magnetostriction constant of the alloy is made opposite to the sign of a stress by applying a different Ar sputtering pressure according to the sign of the saturation magnetostriction constant, in order to increase the effective perpendicular magneto anisotropy energy KUeff containing the components of magneto elastic energy expressed by an expression (here, lambda s is the saturation magnetostriction constant, and sigma is the stress).
申请公布号 US6132567(A) 申请公布日期 2000.10.17
申请号 US19990225447 申请日期 1999.01.06
申请人 SAMSUNG DISPLAY DEVICE CO., LTD. 发明人 KIM, JAI-YOUNG
分类号 C23C14/16;C23C14/34;G11B11/105;H01F10/187;H01F41/18;(IPC1-7):C23C14/00 主分类号 C23C14/16
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