| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of cracks over a large area by providing a vase material with recessed parts recessed form the surface, forming thick films of ceramics or the like on the exposed faces facing the recessed parts by vapor growing and removing the base material from the thick films. SOLUTION: The surface of a base material 1 composed of graphite or the like is provided with recessed parts 2A and 2B. The exposed faces preferably contain a slope with the angle ofθ=30 deg. or larger, particularly about >=60 deg. to the surface of the base material, in the case curved face are formed, >=0.5 mm radius of curvature R is preferable, the maximum width W of the recessed parts 2A and 2B shown from the planar face is preferably controlled to >=50 mm, and the depth D of the recessed parts is suitably controlled to about 1 to 10 mm. On the exposed faces facing to the recessed parts 2A and 2B in this base material 1, thick films 6A and 6B of silicon carbide or the like are formed to the thickness of >=1 mm by a chemical vapor deposition method. After that, form this thick films 6A and 6B, the base material 1 is removed by cutting, grinding, baking or the like to obtain a bulky body composed of the thick films 6A and 6B and free from cracks.
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