FABRICATING METHOD OF TMA

摘要

PURPOSE: A method for manufacturing a thin film actuated mirror arrays(AMA) is provided to prevent the AMA panel from being damaged by particles by dicing up to a base surface of a drive substrate using an adhesion layer and a passivation substrate. CONSTITUTION: An AMA panel(150) having M times N thin film AMAs(200) is formed on a drive substrate(10). An adhesion layer(170) is formed at a periphery of the AMA panel(150) so as to be spaced apart. A pad(160) is formed at a periphery of the adhesion layer(170) so as to be spaced apart. A passivation substrate(180) is formed on the adhesion layer(170). An overall dicing process is carried out up to a base surface of the drive substrate(10). After exposing the adhesion layer(170) at ultraviolet rays, the passivation substrate(180) is separated from the adhesion layer(170). After separating the adhesion layer(170) from the drive substrate(10), the pad(160) is bonded to a tape carrier package.