MICROHOLE STRAIGHTNESS MEASUREMENT SYSTEM WITH 3 PRECISION MOVING STAGE

摘要

PURPOSE: An apparatus for measuring straightness of minute holes is provided to widen a geometric measurement field of a ferrule for an optical connector by allowing the straightness within holes having a micro capillary structure to be measured. CONSTITUTION: An apparatus for measuring straightness of minute holes includes a micromirror lens(1) for measuring the straightness of micromirror holes and a CCD camera(2) to which numerous unit cells are attached. A 3-axis fine driving stage includes a Z axis driving stage(3) for controlling the focus of the micromirror lens(1) included in the CCD camera(2). A computer has an A/D converter for converting analog signals generated by the unit cells of the CCD camera(2) in proportion to the intensity of light into digital signals. A back illumination device is installed below a stage to which a measurement sample is mounted.