SEMICONDUCTOR DEVICE FABRICATION APPARATUS, LOAD-LOCK CHAMBER AND SEMICONDUCTOR DEVICE FABRICATION METHOD OF USING THE SEMICONDUCTOR DEVICE FABRICATION APPARATUS,申请号KR19930020980-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE FABRICATION APPARATUS, LOAD-LOCK CHAMBER AND SEMICONDUCTOR DEVICE FABRICATION METHOD OF USING THE SEMICONDUCTOR DEVICE FABRICATION APPARATUS
摘要
申请公布号	KR100267580(B1)	申请公布日期	2000.10.16
申请号	KR19930020980	申请日期	1993.10.11
申请人	SONY CORPORATION	发明人	MASAKI, SAITO
分类号	H01L21/205;C23C16/44;C23C16/54;H01L21/31;(IPC1-7):H01L21/20	主分类号	H01L21/205
代理机构		代理人
主权项
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