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发明名称
THE APPARATUS OF COATING FOR THREE DIMENSION TYPE OF PRISM SUBSTRATE
摘要
申请公布号
KR100269010(B1)
申请公布日期
2000.10.16
申请号
KR19970042525
申请日期
1997.08.29
申请人
LEYBOLD SYSTEMS GMBH
发明人
PATZ, ULRICH;ICKES, GERD
分类号
C23C14/24;B65G49/07;C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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