CAPACITOR OF SEMICONDUCTOR AND METHOD FOR MAKING THE SAME

摘要

PURPOSE: A capacitor of a semiconductor and a method for making the same are provided to make a high-integration degree by increasing a charging capacitance of a capacitor and a reliability of a device. CONSTITUTION: A plug(23) is connected to either a source or a drain formed on a semiconductor substrate(21). A lower electrode is connected to the plug, a lower end surface is widely patterned as compared to the plug. A high dielectric layer(29) encloses the lower electrode of the capacitor. A capacitor upper electrode(30) is formed on the high dielectric layer(29), and encloses the lower electrode of the capacitor. Both surfaces of the capacitor lower electrode have a predetermined slope. Thereby, a charging capacitance of a capacitor and a reliability of a device are increased.