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发明名称
MAGNETRON SPUTTERING SOURCE
摘要
申请公布号
EP1042526(A1)
申请公布日期
2000.10.11
申请号
EP19980958140
申请日期
1998.12.15
申请人
BALZERS HOCHVAKUUM AG
发明人
HAAG, WALTER;GRUENENFELDER, PIUS;SCHWENDENER, URS;SCHLEGEL, MARKUS;KRASSNITZER, SIEGFRIED
分类号
H05H1/24;C23C14/08;C23C14/34;C23C14/35;H01J37/34;H01L21/285;(IPC1-7):C23C14/35
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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