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法人/股东/高管

发明名称
摘要
申请公布号	JP3097668(B2)	申请公布日期	2000.10.10
申请号	JP19980201853	申请日期	1998.07.16
申请人		发明人
分类号	H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L21/82	主分类号	H01L21/822
代理机构		代理人
主权项
地址

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