| 摘要 |
PROBLEM TO BE SOLVED: To prevent the release, crack, warping, or the like between substrates in sintering and to ensure the high reliability of a sensor by continuously integrating a heater for heating a gas sensor at both sides of an internal empty chamber. SOLUTION: A gas sensor is used to detect the voltage between a detection electrode 2 and a reference electrode 3 that are mounted to one surface of a solid electrolyte substrate 1 and to measure gas concentration according to the voltage level. The detection electrode 2 is installed in an internal empty chamber 4 that is surrounded by a ceramic body. The internal empty chamber 4 is provided with a gas introduction port 5 for allowing a gas to be inspected to disperse and flow in from a measurement atmosphere. The reference electrode 3 is an atmosphere reference electrode that is separated from the internal empty chamber 4 by a partition wall 6 and is arranged in duct 7 leading to the atmosphere. Heater substrates 8 are directly joined so that the internal empty chamber 4 and the duct 7 are held between. A heater 9 for heating the gas sensor is buried in each heater substrate 8 and is shielded from atmospheric gas and is integrated continuously at both the sides of the internal empty chamber 4. |
