| 摘要 |
PROBLEM TO BE SOLVED: To make S/N ratio high and make detectable a normal unevenness even if an object is moved by providing a sensitive element array arranging a sensitive element in an array-shaped to a unevenness selective sensor and providing a control circuit, a sensitive electrode and a condenser and so forth to the sensitive element. SOLUTION: One sensitive element 11 is composed of a sensitive electrode 1, an amplifier 2 and a condenser 10 and so forth. The unevenness detective sensor is constituted by arranging the sensitive element 11 in an array whose length is N lines and whose width is M rows as an sensitive element array. A memory function is built in each sensitive element and unevenness information on objects is lumped together then stored in memory temporarily and outputs in order. Thereby, unevenness for objects can be detected accurately even is the object move. And scanning frequency can be decreased by scanning without worrying about moving velocity for objects by dint of providing such memory facility, thereby, burden of a peripheral circuit can be decreased. The amplifier is provided on each sensitive element 11, thereby, S/N ratio can be increased. |
