发明名称 APPARATUS FOR PULLING SINGLE CRYSTAL AND PULLING OF SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To eliminate the need for speed control when moving the load of a single crystal from a neck part to a holding means and prevent the height of an apparatus for pulling from increasing when a seed crystal and a constricted part under a large-diameter part together by a wire method. SOLUTION: This apparatus for pulling a single crystal 2 is capable of rotating a main drum 8 by a main motor 9 in order to lift and lower a main wire 7 having a seed crystal 14 attached to the tip thereof, arranging auxiliary drums 27a and 27b coaxially with the main drum 8 and integrally rotating the auxiliary drums 27a and 27b with the main drum 8 by the main motor 9 or selectively rotating the auxiliary drum 27a and 27b independently of the main drum 8 by an auxiliary motor 21 in order to lift and lower auxiliary wires 20a and 20b having parts 30 for engaging with a constricted part 2c of the single crystal 2 capable of engaging with the constricted part 2c and supporting the constricted part 2c and attached to the tips thereof.
申请公布号 JP2000281485(A) 申请公布日期 2000.10.10
申请号 JP19990094137 申请日期 1999.03.31
申请人 SUPER SILICON KENKYUSHO:KK 发明人 IIDA AKIHIRO
分类号 C30B15/30;(IPC1-7):C30B15/30 主分类号 C30B15/30
代理机构 代理人
主权项
地址