发明名称 |
APPARATUS FOR PULLING SINGLE CRYSTAL AND PULLING OF SINGLE CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To eliminate the need for speed control when moving the load of a single crystal from a neck part to a holding means and prevent the height of an apparatus for pulling from increasing when a seed crystal and a constricted part under a large-diameter part together by a wire method. SOLUTION: This apparatus for pulling a single crystal 2 is capable of rotating a main drum 8 by a main motor 9 in order to lift and lower a main wire 7 having a seed crystal 14 attached to the tip thereof, arranging auxiliary drums 27a and 27b coaxially with the main drum 8 and integrally rotating the auxiliary drums 27a and 27b with the main drum 8 by the main motor 9 or selectively rotating the auxiliary drum 27a and 27b independently of the main drum 8 by an auxiliary motor 21 in order to lift and lower auxiliary wires 20a and 20b having parts 30 for engaging with a constricted part 2c of the single crystal 2 capable of engaging with the constricted part 2c and supporting the constricted part 2c and attached to the tips thereof.
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申请公布号 |
JP2000281485(A) |
申请公布日期 |
2000.10.10 |
申请号 |
JP19990094137 |
申请日期 |
1999.03.31 |
申请人 |
SUPER SILICON KENKYUSHO:KK |
发明人 |
IIDA AKIHIRO |
分类号 |
C30B15/30;(IPC1-7):C30B15/30 |
主分类号 |
C30B15/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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