| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to simulate progressing conditions of substrate processing without actual operation of a substrate processing device, and guide to optimum input order. SOLUTION: Firstly a recipe for each substrate group is obtained, and each processing schedule is calculated according to the responding substrate group. A processing schedule for a substrate group which is the first input subject is set at a specified position of the axis of time, and the processing schedule for other input subjects are set successively. As a result of comparing each processing schedule of a plurality of substrate groups with others and then modifying them, a modified schedule is generated (Step S15). At the time of modification, whether the commanded time in processing schedule is overlapped or not is checked. When overlapping of commanded time is found out, the overlapping is resolved by shifting the counter schedule of the processing schedule according to the overlapped time range. As a result, the optimum schedule of each substrate group can be obtained. |
