| 摘要 |
PROBLEM TO BE SOLVED: To ensure optical performance of a device including an optical part without increasing the size of a chamber air conditioning part or adding to a control object, by branching and supplying gas whose temperature is controlled as specified from each air conditioning system to a device including an optical part arranged in a region of each air conditioning system. SOLUTION: An alignment optical system 220 is subjected to air-conditioning by branching a duct 1 from a duct 216D for blowing temperature-controlled gas from an air conditioning means 216 for controlling the temperature of a space BO wherein the alignment optical system 220 is arranged. An off-axis scope 234 is also subjected to air-conditioning by branching a duct 2 from a duct 217D which blows gas for controlling the temperature of a space CO wherein the off-axis scope 234 is arranged. As a result, optical performance of the alignment optical system 220 and the off-axis scope 234 can be ensured without enlarging the size of a chamber air-conditioning part or adding to the control object.
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