| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a production method of electrostatic chuck in which dimples of suitable size and shape can be formed easily on the chuck face without lowering productivity. SOLUTION: The electrostatic chuck 1 is produced by forming chuck electrode layers 3, 4 on a ceramics insulating basic material 2. A plurality of fine dimples 6 are formed on the chuck face S1 of the insulating basic material 2. The electrostatic chuck 1 is produced as follows. A sheet material formed by weaving heat-resistant inorganic material fibers is applied tightly to the surface of an unsintered ceramic body eventually serving as the chuck face. Under that state, pressure sintering is performed and a resulting sintered ceramic body is taken out from the sheet material. According to the method, the dimples 6 are transferred onto the chuck face S1.</p> |
