| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an optical wavelength converting device which can improve the efficiency of wavelength conversion of light, and to obtain the method for the production of the device. SOLUTION: This optical wavelength converting device has polarity inversion regions, comprising a compd. semiconductor and polarity non-inversion regions comprising the compd. semiconductor, formed alternately with a prescribed period along the waveguide direction on a substrate consisting of a single element semiconductor. The method to produce the device includes a step-eliminating process to eliminate steps 118 of atomic layers caused by the off-angle from the perpendicular direction to the waveguide direction, a step-forming process to form steps 117 of the single atomic layer with repeated recesses and projections of the height, corresponding to the thickness of the single atomic layer with a specified period on the surface of the single element semiconductor substrate 110, and a process of forming a periodic polarization inversion region to alternately form polarity inversion regions 130 and polarity non-inversion regions 160 on the steps 117 of the single atomic layer. With this method, a periodic polarity inversion layer 120 can be formed on the single element semiconductor substrate without etching process, so that the decrease in the conversion efficiency of wavelength of light due to the etching residue on the substrate can be dissolved.</p> |
