摘要 |
PROBLEM TO BE SOLVED: To provide a compact piezoelectric resonator by which any unnecessary resonance response generated near a low-order mode can be reduced, and a spurious mode generated near a specific high-order mode to be used can be suppressed to the minimum, and the degree of freedom of the design of a main electrode or a sub-electrode can be ensured. SOLUTION: Relating to this piezoelectric resonator, main electrodes 2 formed so as to face each other, lead electrodes 3 introduced from each main electrode, and output electrodes 4 for outside connection are formed on the surface and back faces of a piezoelectric substrate 1, and sub-electrodes 5 are formed on the surface and back faces of the piezoelectric substrate. In this case, each resistivity of the main electrode 2 and the sub-electrode 5 is set so as to beρm,ρs, and each film thickness of the main electrode 2 and the sub-electrode 5 is set so as to be tm, ts. Then, each sheet resistance Rm, Rs of the main electrode 2 and the sub-electrode 5 expressed by Rs=ρm/ts, Rs=ρs/ts is set so as to Rm<Rs.
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