| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic chamber structure which is easily manufactured and hardly damaged when it is manufactured. SOLUTION: Two or more ceramic members 3, 5, 7, 9, and 11 which are nearly equal to each other in thickness are assembled into a ceramic chamber of integral structure. At this point, it is preferable that ceramic members are formed of one or more ceramics selected out of Si, SiC, SiN, AlN, Al2O3, and B4C. It is preferable that SiC is impregnated with Si.
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