| 发明名称 |
Locking gas valve device, with pressure reducer between inlet and narrow point |
| 摘要 |
<p>The locking gas valve device (1) has a narrow point (8). The valve device supplies an apparatus with locking gas. There is a pressure reducer (6) between the valve device inlet (2) and the narrow point. The narrow point may be in the form of a membrane, or (better) capillaries, which may be made of quartz and jacketed in plastic.</p> |
| 申请公布号 |
DE19914282(A1) |
申请公布日期 |
2000.10.05 |
| 申请号 |
DE1999114282 |
申请日期 |
1999.03.30 |
| 申请人 |
LEYBOLD VAKUUM GMBH |
发明人 |
PALTEN, THOMAS;STOLLE, ROBERT;KALISCH, DIRK |
| 分类号 |
F17C13/00;F04D19/04;F04D27/00;F17D3/00;(IPC1-7):F04D29/00 |
主分类号 |
F17C13/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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