发明名称 METHOD FOR EXTENDING LIFE SPAN OF POLYMERIC COMPONENT USED IN RADIATION ATMOSPHERE BY DLC THIN FILM DEPOSITION AND EFFICACY THEREOF
摘要 PURPOSE: A method for extending a life span of a polymeric component and an efficacy thereof are provided to decrease the radiation-induced oxidative degradation speed of the polymeric component by depositing a DLC(diamond-like carbon) thin film employing a plasma-enhanced chemical vapor deposition method on the surface thereof. CONSTITUTION: A device is composed of a reactor(1), an RF(radio frequency) matching unit(2), an RF generator(3), a vacuum pump(4), a manometer(5), N2, CH4, CO2 gas cylinders(6,7,8), a flow meter(9), gas mixer(10), a DC(direct current) voltage meter(11) and an RF(radio frequency) power meter(12). Herein, a DLC(diamond-like carbon) thin film is deposited on a polymeric component utilizing a plasma-enhanced chemical vapor deposition method. A radiation oxidative resistance is increased by a DLC thin film layer. Thus, the radiation-induced oxidative degradation speed of the polymeric material is decreased.
申请公布号 KR20000059452(A) 申请公布日期 2000.10.05
申请号 KR19990007066 申请日期 1999.03.04
申请人 KOREA ATOMIC ENERGY RESEARCH INSTITUTE 发明人 PARK, GWANG JUN
分类号 C23C16/50;(IPC1-7):C23C16/50 主分类号 C23C16/50
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