发明名称 |
System and method for reducing corner rounding in mask fabrication |
摘要 |
A method for fabricating mask patterns in accordance with the present invention includes the steps of providing a mask blank (122) for patterning, propagating a laser/electron beam (120) having an elliptical cross-sectional shape onto the mask blank, the elliptical cross-sectional shape having an elongated axis and edges at opposite ends of the elongated axis and positioning the mask blank to write a pattern on the mask blank wherein the positioning includes employing the edges of the elliptical cross-sectional shape of the laser/electron beam to write corners (124) of the pattern. A system is also included. <IMAGE> |
申请公布号 |
EP1041440(A2) |
申请公布日期 |
2000.10.04 |
申请号 |
EP20000104732 |
申请日期 |
2000.03.04 |
申请人 |
INFINEON TECHNOLOGIES NORTH AMERICA CORP. |
发明人 |
CARPI, ENIO LUIZ;BESENBOCK, WOLFGANG |
分类号 |
G03F1/00;G03F1/78;G03F7/20;H01L21/027 |
主分类号 |
G03F1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|