| 摘要 |
A speckle interferometer for measuring displacement deformation, motion or strain of an optically irregular surface of a specimen is disclosed. The interferometer includes laser, a spatial filter for receiving radiation from the laser and converting it into a spherical beam and projecting it to the optically irregular surface of the specimen is located. A reference plate located in or near the second location for reflecting or scattering some or all the radiation to a fourth location, said reflection interfering with the reflection from the optically irregular surface to form a pattern of speckles. A camera and imaging system for measuring displacement and changes in intensity of the speckles is also included.
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