发明名称 |
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet |
摘要 |
An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.
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申请公布号 |
US6126790(A) |
申请公布日期 |
2000.10.03 |
申请号 |
US20000499144 |
申请日期 |
2000.02.07 |
申请人 |
CVC PRODUCTS, INC. |
发明人 |
MOSLEHI, MEHRDAD M.;CHENG, SHIYUAN;DAVIS, CECIL J.;HEIMANSON, DORIAN |
分类号 |
B05D5/12;C23C14/00;C23C14/22;C23C14/35;C23C14/58;H01F3/00;H01F5/00;H01F7/20;H01F41/14;H01F41/18;H01H1/00;(IPC1-7):C23C14/35 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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