WAFER DRYING APPARATUS,申请号KR19940033862U-传众专利搜索

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发明名称	WAFER DRYING APPARATUS
摘要
申请公布号	KR200197862(Y1)	申请公布日期	2000.10.02
申请号	KR19940033862U	申请日期	1994.12.13
申请人	HYUNDAI MICRO ELECTRONICS CO., LTD.	发明人	JEONG, JAE YOUNG
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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