| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a substrate heater capable of heating, in particular a transparent substrate such as a glass substrate or the like by the use of a lamp in a substrate heater. SOLUTION: A substrate heater 1 has a wavelength conversion plate 3, which shifts the maximum intensity wavelength of lights emitted from a halogen lamp 2 to long wavelength side and is irradiated onto a glass substrate 4. Since the lights emitted from the wavelength conversion plate 3 and shifted to the side of maximum intensity wavelength are efficiently absorbed into the glass substrate 4 too, it is possible to increase the temperatures of the glass substrate 4 at a high rate.</p> |
